LayTec EpiCurve® TT
To overcome the challenges that occur with larger wafers (4", 6" or 8"), you need the advanced EpiCurve® TT system. It combines wafer curvature measurements with all the features of the EpiTT: emissivitycorrected pyrometry and growth rate/thickness measurements by threewavelength tool will help you avoid cracks, achieve flat wafers and control temperature homogeneity.